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Fully automatic Wafer sorting equipment
• ASW6000 series wafer sorting equipment supports wafer mutual transfer between 2-6 PORTs, is compatible with SEMI standard Foup, Fosb and Open Cassette, and is equipped with microenvironment clean keeping system, which can meet the cleanliness requirements of Class1. Equipped with double-sided wafer barcode reading system and wafer inversion function, it can be applied to various application scenarios of wafer transmission.
• Suitable for sorting and transmission of 8-12 inch wafers.
Equipment model:
ASW6000 series
Product features:
ASW6000 series
Product features:
• Processable thin wafer
• The modes such as wafer carrier and material box for unloading
• Wafer sorting function
• Wafer rewinding function
• SECS/GEM or simple networking function
• Modular design
Technical specification and parameter:
• Wafer size: 8"~ 12"
• Power consumption: AC220V 10A
• Control system: PC+PLC control
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